- Direct-drive motor structure Direct coupling without gears or belts reduces backlash and mechanical compliance for smoother, more responsive motion in vacuum operation.
- Lower particulate generation Fewer mechanical transmission interfaces means less wear debris, a key advantage in clean and vacuum environments where contaminants are amplified.
- New I/O module An updated input/output module improves control integration for automation functions within vacuum and load-lock systems.
- Hardware interrupt support Interrupt-driven inputs enable low-latency event handling for interlocks, alignment events, and coordination with pressure and door-state signals.
- Reduced maintenance sensitivity Eliminating belts and gear trains removes consumable transmission components that would otherwise require routine service.
- Vacuum-oriented architecture The platform is designed specifically for vacuum transfer inside chambers, load-lock systems, and cluster tools rather than open factory-floor use.
Description
The SIASUN PHOENIX-S25 Series is a vacuum manipulator platform engineered for clean transfer inside vacuum chambers, load-lock systems, and cluster tools. Unlike conventional factory-floor robots, vacuum manipulators must manage contamination, lubrication, and sealing carefully, and the PHOENIX-S25 addresses this with a direct-drive motor structure that removes gears, belts, and similar transmission elements from the internal architecture. Reducing these mechanical interfaces lowers particulate generation, cuts the number of consumable transmission parts, and supports a cleaner, more responsive motion profile. The series also introduces a new I/O module with hardware interrupt support for low-latency event handling.
These characteristics make the PHOENIX-S25 well suited to contamination-sensitive processes where parts or substrates move between modules without exposure to ambient air. Hardware interrupt capability allows the control system to react quickly to vacuum-system status, load-lock door states, sensor-driven alignment events, and module-readiness signals, helping coordinate deterministic motion within a vacuum transfer region. It is most closely associated with semiconductor and display manufacturing, where wafers and panels are handled inside vacuum cluster tools to minimize oxidation and contamination. The PHOENIX-S25 is supplied on a quotation basis, with configuration and process integration confirmed before ordering.
Features
Specs
| Brand | SIASUN |
|---|---|
| Model | PHOENIX-S25 Series |
| Type | Vacuum manipulator |
| Drive Structure | Direct-drive (no gears or belts) |
| Control I/O | New I/O module with hardware interrupt support |
| Origin | China |
Industries
Frequently Asked Questions
It is a SIASUN vacuum manipulator platform designed to move parts or substrates between process modules inside vacuum chambers, load-lock systems, and cluster tools without exposing them to ambient air. Its direct-drive architecture and updated I/O are intended for clean, responsive operation.
Removing gears, belts, and similar transmission elements lowers particulate generation from mechanical wear, reduces the number of consumable parts, and can improve dynamic response by reducing backlash and compliance, all of which are valued in vacuum and clean handling.
It is most strongly associated with semiconductor and display manufacturing, where wafers and panels are transferred between modules in vacuum cluster tools to reduce oxidation and contamination risk. It suits processes where controlled, clean transfer is a fundamental requirement.
The PHOENIX-S25 Series is supplied on a quotation basis, subject to availability. Submit a quote request through Robotix Market and our team will confirm pricing, availability, configuration, and process integration requirements for your project.
The PHOENIX-S25 Series is covered by the manufacturer's warranty provided by SIASUN. Robotix Market ships worldwide, with delivery details confirmed as part of your quotation.
SIASUN PHOENIX-S25 Series Vacuum Manipulator
- Regular price
- Request Quote for Price
Robotic Arm
Recently Viewed
You haven't viewed any products yet.
