- Vacuum chambers
- Load-lock systems
- Cluster tools
- Wafers/panels/carriers
- Vacuum-oriented
- Air isolation
Description
The SIASUN PHOENIX-S25 Vacuum Manipulator is integrated into vacuum chambers, load-lock systems, and cluster tools. Moves parts or substrates (wafers, panels, carriers, precision components) between process modules.
Positioned as a vacuum-oriented manipulator platform without exposing materials to ambient air.
The Phoenix-S25 serves semiconductor and industrial vacuum handling applications.
Contact for pricing and availability.
Features
Specs
| Model | Vacuum Manipulator PHOENIX-S25 Series |
|---|---|
| Robot Type | Vacuum manipulator |
| Target Use | Semiconductor handling |
| Brand | SIASUN |
Industries
Frequently Asked Questions
Contact us for current pricing, availability, and a tailored quote on the SIASUN Vacuum Manipulator Phoenix.
The SIASUN PHOENIX-S25 Vacuum Manipulator handles substrates in vacuum chambers and cluster tools. Air-isolated transfer for wafers, panels, and precision components.
The SIASUN Vacuum Manipulator Phoenix is well suited to Industrial applications.
Yes. Robotix Market ships worldwide with full logistics support, customs handling, and after-sales assistance.
Yes. Robotix Market supplies businesses worldwide with invoicing and after-sales support. Contact us for a quote.
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