- Vacuum manipulator
- Cluster tools
- Deposition/etch
- Load locks
- Metrology stations
- Vacuum conditions
Description
The SIASUN PHOENIX PLUS Series Vacuum Manipulator operates within vacuum process equipment such as cluster tools for deposition, etch, or related vacuum processing.
Transfers wafers or substrates between load locks, process modules, and metrology stations while maintaining controlled vacuum conditions.
The Phoenix Plus Series serves semiconductor and industrial vacuum handling applications.
Contact for pricing and availability.
Features
Specs
| Model | Vacuum Manipulator PHOENIX PLUS Series |
|---|---|
| Robot Type | Vacuum manipulator |
| Target Use | Cluster tool integration |
| Brand | SIASUN |
Industries
Frequently Asked Questions
Contact us for current pricing, availability, and a tailored quote on the SIASUN Vacuum Manipulator Phoenix Plus Series.
The SIASUN PHOENIX PLUS Vacuum Manipulator operates in cluster tools for deposition and etch. Controlled vacuum transfer between load locks and process modules.
The SIASUN Vacuum Manipulator Phoenix Plus Series is well suited to Industrial applications.
Yes. Robotix Market ships worldwide with full logistics support, customs handling, and after-sales assistance.
Yes. Robotix Market supplies businesses worldwide with invoicing and after-sales support. Contact us for a quote.
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