- VTM operation
- Transfer chamber
- Silicon wafers
- Process chambers
- Cleanliness
- Positioning accuracy
Description
The SIASUN PHOENIX Series Vacuum Manipulator operates within a vacuum transfer module (VTM) or transfer chamber of a cluster tool. Moves substrates (commonly silicon wafers) between load locks and multiple process chambers.
Maintains stringent cleanliness, positioning accuracy, and uptime requirements as part of the front-end automation ecosystem.
The Phoenix Series serves semiconductor, logistics, research, and inspection applications.
Contact for pricing and availability.
Features
Specs
| Model | Vacuum Manipulator PHOENIX Series |
|---|---|
| Robot Type | Vacuum manipulator |
| Target Use | VTM cluster tool |
| Brand | SIASUN |
Industries
Frequently Asked Questions
Contact us for current pricing, availability, and a tailored quote on the SIASUN Vacuum Manipulator Phoenix Series.
The SIASUN PHOENIX Vacuum Manipulator operates in vacuum transfer modules and cluster tools. Silicon wafer handling with stringent cleanliness and positioning accuracy.
The SIASUN Vacuum Manipulator Phoenix Series is well suited to Industrial applications.
Yes. Robotix Market ships worldwide with full logistics support, customs handling, and after-sales assistance.
Yes. Robotix Market supplies businesses worldwide with invoicing and after-sales support. Contact us for a quote.
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