- Direct-drive, beltless design A gearless, beltless motor structure reduces backlash and mechanical wear points for smoother, more reliable transfer motion.
- Vacuum-environment suited Built for low particle generation and controlled outgassing so wafers move through vacuum tools without breaking the controlled environment.
- Sensitive-substrate handling Transfers wafers between load locks, transfer chambers and process modules such as deposition, etch and metrology stations.
- Vibration-controlled motion Motion is tuned to minimize vibration during pick, place and transit, protecting high-value substrates.
- Integration-ready control Supplied with a motion controller and I/O interfaces, including an updated I/O module, for connection to tool-level interlocks and factory signals.
- Repeatable, high-throughput transfer Consistent end-effector handling supports repeatability, throughput and contamination control in semiconductor processing tools.
Description
The SIASUN Vacuum Robot Phoenix is a vacuum-transfer robot for semiconductor and cleanroom manufacturing, engineered to move wafers and other sensitive substrates between load locks, transfer chambers and process modules such as deposition, etch and metrology stations without breaking the controlled environment. Its motion is tuned for stable, smooth transfer in vacuum conditions, where low particle generation, controlled outgassing and vibration control are critical to protecting high-value substrates.
The Phoenix uses a direct-drive architecture that reduces reliance on gears and belts, lowering backlash and mechanical wear points for smoother, more repeatable motion. Delivered as an integration-ready platform with a motion controller and I/O interfaces, it is suited to semiconductor, cleanroom and industrial vacuum-handling applications where repeatability, throughput and contamination control matter. Contact us for detailed specifications, pricing and availability.
Features
Specs
| Brand | SIASUN |
|---|---|
| Model | Vacuum Robot Phoenix (PHOENIX B Series) |
| Robot type | Vacuum wafer-transfer robot |
| Drive architecture | Direct-drive, gearless and beltless |
| Environment | Vacuum / cleanroom (semiconductor tools) |
| Handling | Wafers and sensitive substrates via end-effector blade |
| Control and I/O | Motion controller with integrated I/O module for tool integration |
| Typical applications | Deposition, etch and metrology transfer in semiconductor processing tools |
Industries
Frequently Asked Questions
Contact us for current pricing, availability and a tailored quote on the SIASUN Vacuum Robot Phoenix.
It is a vacuum-transfer robot that moves wafers and other sensitive substrates between load locks, transfer chambers and process modules such as deposition, etch and metrology stations, without breaking the controlled vacuum environment.
Its gearless, beltless direct-drive structure removes intermediate transmission components, reducing backlash and mechanical wear points and supporting smoother, more repeatable motion for precision transfer.
Yes. The Phoenix is delivered as an integration-ready platform with a motion controller and I/O interfaces, including an updated I/O module, for connection to tool-level interlocks and factory automation signals. Detailed numerical specifications are provided per configuration.
Yes. Robotix Market supplies businesses worldwide with invoicing and after-sales support. Contact us for a quote.
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